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Micromachine Pictures
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This is an aluminum micromirror. It is 160 microns across, and is 500 microns from its neighbor. It has holes in it so the material under it can be etched away. The zig zag structures are springs that hold the mirror in place, and allow it to move up and down.
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This is also an aluminum micromirror with a different spring design. This will operate the same as the mirror on the left but the spring's mechanical characteristics will be different. A voltage is applied to the mirror to pull it down electrostatically.
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This is a layout drawing of a 325 element array of mirrors like the mirrors shown at the top of this page. This array will be used in an adaptive optics system.
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The diagram above shows a diagram of a shutter device that can turn individual beams of light on and off independently. This is a very small device with apertures only 10 microns in diameter.
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This is a single shutter device cross section showing more details of the shutter mechanism. The shutter is held in place by a spring, and moved laterally by applying a voltage.
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This is a microphotograph of an array of shutters. The shutters move laterally when a voltage is applied to the comb structures, which attract each other electrostatically.
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